BS-4020A Trinocular Industrial Wafer Inspection Microscope
Nhanganyaya
BS-4020A indasitiri yekuongorora maikorosikopu yakagadzirwa zvakanyanya kuti iongororwe akasiyana saizi mawafer uye PCB hombe. Iyi microscope inogona kupa yakavimbika, yakasununguka uye chaiyo yekutarisa chiitiko. Iine chimiro chakanyatsoitwa, yakakwirira-tsanangudzo optical sisitimu uye ergonomical inoshanda sisitimu, BS-4020 inoona ongororo yehunyanzvi uye inosangana nezvinodiwa zvakasiyana zvekutsvagisa uye kuongororwa kwemawafers, FPD, dunhu pasuru, PCB, zvinhu sainzi, kukanda chaiko, metalloceramics, kuumbwa chaiko, semiconductor uye zvemagetsi nezvimwe.
1. Yakakwana microscopic illumination system.
Iyo microscope inouya neKohler kuvhenekera, inopa kupenya uye kwakafanana kuvhenekera munzvimbo yese yekuona. Yakarongedzwa neinfinity Optical system NIS45, yakakwirira NA uye LWD chinangwa, yakakwana microscopic imaging inogona kupihwa.
Features
Bright field of Reflected llumination
BS-4020A inotora yakanakisa infinity optical system. Munda wekuona wakafanana, wakajeka uye une dhigirii rekubereka kwemavara. Yakakodzera kutarisa opaque semiconductors samples.
Munda wakasviba
Inogona kuona yakakwirira-tsanangudzo mifananidzo payakasviba munda yekutarisa uye kutakura-papamusoro-soro yekutarisa kune zvikanganiso senge makwara akanaka. Inokodzera kutariswa kwepamusoro kwemasamples ane zvinodiwa zvakanyanya.
Bright field of transmitted illumination
Kune masampula akajeka, akadai seFPD uye optical element, iyo inopenya yekutarisa munda inogona kuitika necondenser yemwenje unopfuudzwa. Inogona zvakare kushandiswa neDIC, nyore polarization uye zvimwe zvishongedzo.
Simple polarization
Iyi nzira yekutarisa inokodzera birefringence sampuli senge metallurgical tishu, zvicherwa, LCD uye semiconductor zvinhu.
Yakaratidza kujekesa DIC
Iyi nzira inoshandiswa kuona misiyano midiki mune chaiyo molds. Iyo nzira yekutarisa inogona kuratidza diki mutsauko wehurefu usingaonekwe nenzira yakajairwa yekutarisa muchimiro chekumisikidza uye matatu-dimensional mifananidzo.
2. High quality Semi-APO uye APO Bright field & Dark field zvinangwa.
Nekutora multilayer coating tekinoroji, NIS45 yakatevedzana Semi-APO uye APO chinangwa lens inogona kutsiva spherical aberration uye chromatic aberration kubva kuultraviolet kusvika pedyo infrared. Iko kupinza, kugadzirisa uye kushandura kwemavara kwemifananidzo kunogona kuvimbiswa. Mufananidzo une yakakwirira-resolution uye flat mufananidzo weakasiyana magnification anogona kuwanikwa.
3. Chigadziro chekushanda chiri pamberi pe microscope, yakakodzera kushanda.
Iyo meshini control panel iri pamberi peiyo microscope (padhuze neanoshanda), iyo inoita kuti oparesheni iwedzere nekukurumidza uye nyore kana uchitarisa sampuli. Uye inogona kuderedza kuneta kunokonzerwa nekutarisa kwenguva yakareba uye guruva rinoyangarara rinounzwa nehuwandu hukuru hwekufamba.
4. Ergo tilting trinocular viewing musoro.
Iyo Ergo inorereka yekutarisa musoro inogona kuita kuti kucherekedza kuve kugadzikana, kuitira kuderedza kushushikana kwemhasuru uye kusagadzikana kunokonzerwa nemaawa mazhinji ekushanda.
5. Kutarisa nzira uye kugadzirisa zvakanaka kubata kwechikuva nechinzvimbo chemaoko chakaderera.
Iyo yekutarisisa meshini uye yakanaka gadziriso mubato wechikuva inotora yakaderera ruoko chinzvimbo dhizaini, inoenderana neiyo ergonomic dhizaini. Vashandisi havafanirwe kusimudza maoko kana vachishanda, izvo zvinopa hukuru hukuru hwekunzwa kugadzikana.
6. Danho rine mubato wakavakirwa-mukati.
Iyo yekubatisa mubato inogona kuona iyo inokurumidza uye inononoka kufamba modhi yedanho uye inogona kukurumidza kutsvaga yakakura-nzvimbo masampuli. Izvo hazvichazove zvakaoma kuwana masampula nekukurumidza uye nenzira kwayo kana uchibatanidza pamwe neyakagadziriswa gadziriso mubato wedanho.
7. Chinhanho chakakura (14”x 12”) chinogona kushandiswa kugadzira mapete makuru nePCB.
Nzvimbo dzemicroelectronics uye semiconductor samples, kunyanya wafer, dzinowanzova hombe, saka zvakajairwa metallographic maikorosikopu nhanho haigone kuzadzisa zvavanoda zvekutarisa. BS-4020A ine nhanho yakawandisa ine yakakura kufamba siyana, uye iri nyore uye nyore kufamba. Saka chiridzwa chakanakira chekutarisa microscopic yenzvimbo hombe maindasitiri samples.
8. 12” mawafer anobata anouya nemaikorosikopu.
12” wafer uye diki saizi wafer inogona kucherechedzwa neiyi microscope, nekukurumidza uye yakanaka kufamba nhanho mubato, inogona kuvandudza zvakanyanya kushanda zvakanaka.
9. Anti-static protective cover inogona kuderedza guruva.
Maindasitiri masampuli anofanirwa kunge ari kure neguruva rinoyangarara, uye guruva rinogona kukanganisa kunaka kwechigadzirwa uye mhinduro dzebvunzo. BS-4020A ine nzvimbo yakakura ye-anti-static inodzivirira yekuvhara, iyo inogona kudzivirira kubva kuguruva rinoyangarara uye kudonha guruva kuitira kuchengetedza sampuli uye kuita kuti mhedzisiro yebvunzo iwedzere.
10. Kurebesa kushanda kure uye yakakwirira NA chinangwa.
Izvo zvikamu zvemagetsi uye semiconductors pane redunhu board samples zvine musiyano muhurefu. Nokudaro, zvinangwa zvekufamba kwenguva refu zvakagamuchirwa pane iyi microscope. Zvichakadaro, kuitira kugutsa izvo zvemaindasitiri sampuli 'zvakakwirira zvinodiwa pakugadzirwa kwemavara, iyo multilayer coating tekinoroji yakagadziridzwa uye yakagadziridzwa nekufamba kwemakore uye BF & DF semi-APO uye APO chinangwa chine yakakwirira NA inogamuchirwa, iyo inogona kudzoreredza iwo chaiwo ruvara rwemasampuli. .
11. Dzakasiyana nzira dzekutarisa dzinogona kusangana dzakasiyana siyana dzekuyedza zvinodiwa.
| Kuvhenekera | Bright Field | Munda Werima | DIC | Chiedza cheFluorescent | Polarized Chiedza |
| Reflected Illumination | ○ | ○ | ○ | ○ | ○ |
| Transmitted Illumination | ○ | - | - | - | ○ |
Application
BS-4020A indasitiri yekuongorora maikorosikopu chishandiso chakakodzera chekuongorora akasiyana saizi mawafer uye PCB hombe. Iyi maikorosikopu inogona kushandiswa mumayunivhesiti, zvemagetsi uye machipisi mafekitori ekutsvagisa uye kuongorora mawafers, FPD, redunhu pasuru, PCB, zvinhu sainzi, kukanda chaiko, metalloceramics, chaiyo mold, semiconductor uye zvemagetsi nezvimwe.
Tsanangudzo
| Item | Tsanangudzo | BS-4020A | BS-4020B | |
| Optical System | NIS45 Isingaperi Ruvara Yakagadziriswa Optical System (Tube kureba: 200mm) | ● | ● | |
| Viewing Head | Ergo Tilting Trinocular Head, inogadziriswa 0-35 ° yakarerekera, interpupillary kureba 47mm-78mm; kupatsanura chiyero cheziso:Trinocular=100:0 kana 20:80 kana 0:100 | ● | ● | |
| Seidentopf Trinocular Head, 30 ° yakarereka, interpupillary kureba: 47mm-78mm; kupatsanura chiyero cheziso:Trinocular=100:0 kana 20:80 kana 0:100 | ○ | ○ | ||
| Seidentopf Binocular Head, 30 ° yakarerekera, interpupillary kureba: 47mm-78mm | ○ | ○ | ||
| Eyepiece | Super yakafara munda chirongwa eyepiece SW10X/25mm, diopter inogadziriswa | ● | ● | |
| Super yakafara munda chirongwa eyepiece SW10X/22mm, diopter inogadziriswa | ○ | ○ | ||
| Yakawedzera yakafara munda chirongwa eyepiece EW12.5X/17.5mm, diopter inochinjika | ○ | ○ | ||
| Yakafara munda chirongwa eyepiece WF15X/16mm, diopter inogadziriswa | ○ | ○ | ||
| Yakafara munda chirongwa eyepiece WF20X/12mm, diopter inogadziriswa | ○ | ○ | ||
| Chinangwa | NIS45 Infinite LWD Plan Semi-APO Objective (BF & DF), M26 | 5X/NA=0.15, WD=20mm | ● | ● |
| 10X/NA=0.3, WD=11mm | ● | ● | ||
| 20X/NA=0.45, WD=3.0mm | ● | ● | ||
| NIS45 Infinite LWD Plan APO Objective (BF & DF), M26 | 50X/NA=0.8, WD=1.0mm | ● | ● | |
| 100X/NA=0.9, WD=1.0mm | ● | ● | ||
| NIS60 Infinite LWD Plan Semi-APO Objective (BF), M25 | 5X/NA=0.15, WD=20mm | ○ | ○ | |
| 10X/NA=0.3, WD=11mm | ○ | ○ | ||
| 20X/NA=0.45, WD=3.0mm | ○ | ○ | ||
| NIS60 Infinite LWD Plan APO Objective (BF), M25 | 50X/NA=0.8, WD=1.0mm | ○ | ○ | |
| 100X/NA=0.9, WD=1.0mm | ○ | ○ | ||
| Nosepiece | Backward Sextuple Nosepiece (ine DIC slot) | ● | ● | |
| Condenser | LWD condenser NA0.65 | ○ | ● | |
| Transmitted Illumination | 40W LED magetsi emagetsi ane optical fiber light guide, intensity inogadziriswa | ○ | ● | |
| Reflected Illumination | Yakaratidza chiedza 24V/100W halogen mwenje, Koehler mwenje, ine 6 chinzvimbo turret. | ● | ● | |
| 100W halogen mwenje imba | ● | ● | ||
| Chiedza chinopenya chine 5W LED mwenje, Koehler mwenje, ine 6 chinzvimbo turret | ○ | ○ | ||
| BF1 inopenya munda module | ● | ● | ||
| BF2 inopenya munda module | ● | ● | ||
| DF yakasviba munda module | ● | ● | ||
| Yakavakwa-mukati ND6, ND25 sefa uye kururamisa ruvara sefa | ○ | ○ | ||
| ECO Basa | ECO basa neECO bhatani | ● | ● | |
| Kutarisa | Yakaderera-chinzvimbo coaxial coarse uye yakanyatso kutarisisa, yakanaka kupatsanura 1μm, Kufamba siyana 35mm | ● | ● | |
| Danho | 3 akaturikidzana mechanical stage ane clutching handle, size 14”x12” (356mmx305mm); kufamba siyana 356mmX305mm; Nzvimbo yekuvhenekesa kwechiedza chinofambiswa: 356x284mm. | ● | ● | |
| Wafer holder: inogona kushandiswa kubata 12” wafer | ● | ● | ||
| DIC Kit | DIC Kit yekuvhenekera kunoratidzwa (inogona kushandiswa ku10X, 20X, 50X, 100X zvinangwa) | ○ | ○ | |
| Polarizing Kit | Polarizer yekuvhenekera kwakaratidzwa | ○ | ○ | |
| Analyzer yekuvhenekera kwakaratidzwa, 0-360 ° inotenderera | ○ | ○ | ||
| Polarizer yekuparadzira kuvhenekera | ○ | ○ | ||
| Analyzer yekuvhenekesa kuvhenekera | ○ | ○ | ||
| Zvimwe Zvishandiso | 0.5X C-gomo Adapter | ○ | ○ | |
| 1X C-gomo Adapter | ○ | ○ | ||
| Dust Cover | ● | ● | ||
| Power Cord | ● | ● | ||
| Calibration slide 0.01mm | ○ | ○ | ||
| Muenzaniso Presser | ○ | ○ | ||
Cherechedza: ● Chipfeko Chakajairika, ○ Sarudzo
Muenzaniso Mufananidzo
Dimension
Chikamu: mm
Dhiyagiramu yeSystem
Chitupa
Logistics
